The stages are equipped with a servo drive linear motor with preloaded air bearings and integrated linear encoder. The combination of these noncontact components results in a frictionless motion platform that offers the highest performance, quality, and lifetime.
A high-force linear motor can drive the stage to top speed within a few milliseconds, and the high-capacity bearings can support payloads up to 10 kg. The laterally opposed, actively preloaded air bearing design in this model allows mounting in any orientation.
● Encoder;
● Filter and Air Preparation Kits;
● Single and multi-axis motion controller;
● Pneumatic lock/unlock option;
● XY setups and individual configurations;
● Cable track variations;
● Options with counterweight for vertical (Z) orientation;
● Customizations available;
● Base plates made of granite and systems for reducing vibration;
Positioning systems are ideally suited for many high-precision applications such as metrology, photonics, and precision scanning in semiconductor or flat panel display manufacturing.
Thanks to the friction-free motion, no particles are formed, which makes stages ideal for cleanroom applications.
Specification | EC-ABL-200 | -300 | -400 | -500 |
Motor type | Linear motor with iron core | |||
Opticval Encode resolution | Default 0.1um (optional analog, up to 1nm) | |||
Motor thrust | Continuous 90N/peak 190N | |||
Acceleration(no load) | 5G | |||
Travel [mm] | 100 | 200 | 300 | 400 |
Repeatability Accuracy [um] | ≤±0.2um (if optional 5nm grating, up to ±50nm) | |||
Accuracy [um] | 2um/100mm (less than 0.5um/100mm after calibration) | |||
Flatness [um] | ≤±0.4 | ≤±0.5 | ≤±0.7 | ≤±0.8 |
Straightness [um] | ≤±0.5 | |||
Max Speed [mm/s] | 1000 (depending on the drive and stroke) | |||
Max load capacity [kg] | 10kg |
1) What is the MOQ?
A: MOQ is 1 pcs.
Sample is available for customer to check the quality before bulk order.
2) Do you accept OEM?
A: Yes, OEM and ODM is warmly welcomed.
It is our company’s strength, we can customize the LCD monitor so that can fully meet customers’ requirements.
3) What payment methods does your company accept?
A: T/T, Western Union, Paypal and L/C.
4) What’s the delivery time?
A: Sample: 2-7 working days. bulk order 7-25 working days.
For customized products, delivery time is negotiable.
We will try our best to meet your delivery time.